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Atomic Layer Deposition of Zinc Based Transparent Conductive Oxides.

Sanjeev Kumar Gurram Fraunhofer IST

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English
Fraunhofer Verlag
21 January 2017
In this work Atomic Layer deposition of niobium and titanium doped ZnO based Transparent Conductive Oxide (TCO) coatings were developed. The fundamentals required for the deposition and doping of ZnO TCOs are discussed. The various opto-electronic properties of the niobium and titanium doped ZnO films were determined and compared. A model was proposed to explain the various changes in the opto-electronic properties of these films.

By:  
Edited by:  
Imprint:   Fraunhofer Verlag
Country of Publication:   Germany
Volume:   42
Dimensions:   Height: 210mm,  Width: 148mm,  Spine: 11mm
Weight:   245g
ISBN:   9783839611395
ISBN 10:   3839611393
Series:   Berichte aus Forschung und Entwicklung IST
Pages:   200
Publication Date:  
Audience:   Professional and scholarly ,  Undergraduate
Format:   Paperback
Publisher's Status:   Active

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