Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine Products

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Norio Taniguchi

Nanotechnology

Integrated Processing Systems for Ultra-precision and Ultra-fine Products

Norio Taniguchi

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Hardback

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English

Oxford University Press
01 July 1996

Engineering measurement & calibration; Nanotechnology; Powder technology; Production engineering

Summary
Details

The manufacture of integrated circuits and opto- electronic devices, for example, calls for accuracies in the nanometre range (approximately three atomic lattice spacings). This book examines the technology and systems needed to achieve this level of accuracy. It is written by the leading researchers in Japan, that is the world leaders. The underlying concept of nanotechnology systems comes from the prediction that the extremely high accuracy required in materials processing will ultimately reach the order of 1nm (nanometer) = 0.001 m. Since the distance between lattice atoms is about 0.3 nm this constitutes the limit in resolution for measurable or confirmable lengths of solid materials. This leads directly to processing at the atomic bit level at which sub-nm resolution becomes necessary. This means that the accuracy and resolution of the positioning and measuring apparatus used in atomic bit processing must at least be on the order of sub-nm. Nanotechnology is thus concerned with integrated processing systems with measurement, position control, and processing technologies in the sub-nm range. This is essential in the fabrication of extremely precise and fine parts. fabrication of extremely precise and fine parts.

Edited by: Norio Taniguchi
Imprint: Oxford University Press
Country of Publication: United Kingdom
Dimensions: Height: 253mm, Width: 194mm, Spine: 27mm
Weight: 1.005kg
ISBN: 9780198562832
ISBN 10: 0198562837
Pages: 422
Publication Date: 01 July 1996
Audience: Professional and scholarly , Undergraduate
Format: Hardback
Publisher's Status: Active